Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition

Klauser, W. and Bartenwerfer, M. and Elfert, P. and Krauskopf, J. E. and Fatikow, S.
Proc. of Micro-Nano-Integration
October / 2016
inproceedings
1-4
Nano-Q
Nanogranulare Sensoren für personenbezogenes Quecksilber-Monitoring