FIBLYS (or FIB anaLYSis) is a European funded project where leading researches and industry collaborate to create a new apparatus for nanotechnology that will unite nano-structuring, nano-manipulation, nano-analytic and nano-vision capabilities in one unique ‘multi-nano’ tool. It is based on a dual Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) together with Scanning Probe Microscope (SPM) and optional possibility of important analytical capabilities such as Energy Dispersive X-ray Spectroscopy (EDX), 3D Electron Backscatter Diffraction (EBSD), Time-of-Flight Mass Spectrometry (TOFMS), Electron Beam Induced Current (EBIC) or Cathodoluminescence (CL).

Fusion of AFM and SEM Scans

Wortmann, Tim; 009 / 2009

Towards Automated AFM-based Nanomanipulation in a Combined Nanorobotic AFM/HRSEM/FIB System

Bartenwerfer, M. and Fatikow, S. and Tunnell, R. and Mick, U. and Stolle, C. and Diederichs, C. and Jasper, D. and Eichhorn, V.; Proceedings of the IEEE International Conference on Mechatronics and Automation (ICMA'11); 001 / 2011

Hybrid FIB/SEM/SPM System Used for In-situ Analysis of Milling Process on Metallic Thin Films

Král, Z. and Urbánek, M. and Mick, U. and Eichhorn, V. and Fatikow, S. and Petrenec, M. and Jiruse, J. and Kolíbalová, E. and Zadrazil, M.; Proceedings of the 3M-NANO Conference; 001 / 2011

Automated Nanofabrication by a Combined Robotic SEM/AFM/FIB system

Fatikow, Sergej and Bartenwerfer, Malte and Eichhorn, Volkmar and Zimmermann, Sören and Krohs, Florian; 003 / 2012

TESCAN, s.r.o


Start: 01.09.2008
Ende: 31.07.2011

Website des Projekts