FIBLYS (or FIB anaLYSis) is a European funded project where leading researches and industry collaborate to create a new apparatus for nanotechnology that will unite nano-structuring, nano-manipulation, nano-analytic and nano-vision capabilities in one unique ‘multi-nano’ tool. It is based on a dual Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) together with Scanning Probe Microscope (SPM) and optional possibility of important analytical capabilities such as Energy Dispersive X-ray Spectroscopy (EDX), 3D Electron Backscatter Diffraction (EBSD), Time-of-Flight Mass Spectrometry (TOFMS), Electron Beam Induced Current (EBIC) or Cathodoluminescence (CL).
Fatikow, Sergej and Bartenwerfer, Malte and Eichhorn, Volkmar and Zimmermann, Sören and Krohs, Florian; 003 / 2012
Král, Z. and Urbánek, M. and Mick, U. and Eichhorn, V. and Fatikow, S. and Petrenec, M. and Jiruse, J. and Kolíbalová, E. and Zadrazil, M.; Proceedings of the 3M-NANO Conference; 001 / 2011
Bartenwerfer, M. and Fatikow, S. and Tunnell, R. and Mick, U. and Stolle, C. and Diederichs, C. and Jasper, D. and Eichhorn, V.; Proceedings of the IEEE International Conference on Mechatronics and Automation (ICMA'11); 001 / 2011
Wortmann, Tim; 009 / 2009