Simulation of Probe Misalignment Effects during RF On-Wafer Probing

F.T. von Kleist-Retzow, O.C. Haenssler, S. Fatikow
41st Int. Conf. on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2016
09 / 2016
conference
Technical University of Denmark