Microrobot System for Automatic Nanohandling inside a Scanning Electron Microscope

BIB
Fatikow, S. and Wich, T. and Hülsen, H. and Sievers, T. and Jähnisch, M.
IEEE Int. Conference on Robotics and Automation (ICRA)
05 / 2006
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inproceedings
1402-1407