Automatic Nanohandling Station inside a Scanning Electron Microscope

BIB
Fatikow, S. and Wich, T. and Kray, S. and Hülsen, H. and Sievers, T. and Jähnisch, M. and Eichhorn, V.
2nd Int. Conference in Multi-Material Micro Manufacture (4M)
09 / 2006
inproceedings
17-22