Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory
von Kleist-Retzow, Fabian T. and Tiemerding, Tobias and Elfert, Patrick and Haenssler, Olaf C. and Fatikow Sergej
Journal of Computer and Communications
2016
article
61-67
04
OFFIS Autoren
