Wafer-scale Automation of Electron Beam Induced Depositions - OFFIS

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Wafer-scale Automation of Electron Beam Induced Depositions

Wafer-scale Automation of Electron Beam Induced Depositions

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All authors

Elfert, Patrick and Bartenwerfer, Malte and Fatikow, Sergej

Booktitle

Proc. of IEEE International Conference on Advanced Intelligent Mechatronics (AIM) 2016

Publishing date

2016

Type of Publication

inproceedings

OFFIS Autoren

M.Sc. Patrick Elfert

Patrick Elfert, M.Sc.

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