Vision feedback in an automatic nanohandling station inside an SEM - OFFIS

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Vision feedback in an automatic nanohandling station inside an SEM

Vision feedback in an automatic nanohandling station inside an SEM

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All authors

Sievers, T. and Jähnisch, M. and Schrader, C. and Fatikow, S.

Booktitle

6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East

Publishing date

10 / 2006

Type of Publication

inproceedings

Organization

SPIE

Chapter

63760B

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