Versatile Nanohandling Robot Cell in a Scanning Electron Microscope
Fatikow, S. and Kemper and M. and Kortschack, A. and Sievers, T. and Zenke, J. and Shirinov, A. and Hohn, S.
Proc. of 12th Mediterranean Conf. on Control and Automation
06 / 2004
inproceedings
