Towards Automated AFM-based Nanomanipulation in a Combined Nanorobotic AFM/HRSEM/FIB System
Bartenwerfer, M. and Fatikow, S. and Tunnell, R. and Mick, U. and Stolle, C. and Diederichs, C. and Jasper, D. and Eichhorn, V.
Proceedings of the IEEE International Conference on Mechatronics and Automation (ICMA'11)
01 / 2011
inproceedings
171-176
FIBLYS
FIB anaLYSis
FIB anaLYSis
