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Reference pattern-based 2D measurement with nano resolution

Reference pattern-based 2D measurement with nano resolution

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All authors

Wang, Z. and Su, Sh. and Verevkin, Y.K. and Fatikow, S.

Booktitle

6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East

Publishing date

10 / 2006

Type of Publication

inproceedings

Organization

SPIE

Chapter

63760M

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