Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials - OFFIS

Your browser does not support JavaScript!

To use all the features of this page, you need JavaScript!<br> Please update your browser or enable JavaScript in your settings.

Home
OFFIS
Publikationen
Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials

Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials

Export

All authors

Fatikow, Sergej and Eichhorn, Volkmar and Bartenwerfer, Malte and Krohs, Florian

Booktitle

Emerging Technologies Factory Automation (ETFA), 2013 IEEE 18th Conference on

Publishing date

2013

Type of Publication

inproceedings

Pages

1-4

Doi

10.1109/ETFA.2013.6648143

Privacy Data Transparency Contact Legals