Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors - OFFIS

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Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors

Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors

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All authors

O.C. Haenssler, S. Fatikow, D. Théron

Journal

J. of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Publishing date

01 / 2018

Type of Publication

article

Pages

9

Doi

10.1116/1.5006161

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