Micro-/Nano-Integration for MEMS based on nano-robotic assembly - OFFIS

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Micro-/Nano-Integration for MEMS based on nano-robotic assembly

Micro-/Nano-Integration for MEMS based on nano-robotic assembly

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All authors

Wich, T. and Mikczinski, M. and Fatikow, S.

Booktitle

ISR/ROBOTIK 2010

Publishing date

01 / 2010

ISBN / ISSN

978-3-8007-3273-9

Type of Publication

inproceedings

Pages

1095-1102

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