Hybrid FIB/SEM/SPM System Used for In-situ Analysis of Milling Process on Metallic Thin Films - OFFIS

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Hybrid FIB/SEM/SPM System Used for In-situ Analysis of Milling Process on Metallic Thin Films

Hybrid FIB/SEM/SPM System Used for In-situ Analysis of Milling Process on Metallic Thin Films

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All authors

Král, Z. and Urbánek, M. and Mick, U. and Eichhorn, V. and Fatikow, S. and Petrenec, M. and Jiruse, J. and Kolíbalová, E. and Zadrazil, M.

Booktitle

Proceedings of the 3M-NANO Conference

Publishing date

01 / 2011

Type of Publication

inproceedings

Projects

FIBLYS
FIB anaLYSis

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