Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining - OFFIS

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Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining

Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining

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All authors

Voigt, F. and Gerbach, R. and Krohs, F.

Booktitle

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Publishing date

03 / 2008

Type of Publication

article

Edition

27/2

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