Development of a Versatile Nanohandling Station in a Scanning Electron Microscope

Fatikow, S. and Fahlbusch, S. and Garnica, S. and Hülsen, H. and Kortschack, A. and Shirinov, A. and Sill, A.
Proc. of the 3. Int. Workshop on Microfactories (IWMF)
09 / 2002
inproceedings
93-96