Closing the Loop: High-Speed Visual Servoing and Control of a commercial Nanostage inside the SEM

BIB
Tiemerding, Tobias and Diederichs, Claas and Zimmermann, Sören and Fatikow, Sergej
Proceedings of the 3rd 3M-NANO Conference
8 / 2013
inproceedings
NanoBits
Exchangeable and Customizable Scanning Probe Tips