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Automated mechanical characterization of 2D materials using SEM based visual servoing

Automated mechanical characterization of 2D materials using SEM based visual servoing

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All authors

Zimmermann, Sören and Tiemerding, Tobias and Fatikow, Sergej and Wang, W. and Li, T. and Wang, Y.

Booktitle

Proceedings of the 3M-NANO Conference

Publishing date

8 / 2013

Type of Publication

inproceedings

Projects

NanoBits
Exchangeable and Customizable Scanning Probe Tips

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