@articleO.C2018, Author = {O.C. Haenssler, S. Fatikow, D. Théron}, Title = {Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors}, Journal = {J. of Vacuum Science \& Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena}, Year = {2018}, Pages = {9}, Month = {01}, Doi = {10.1116/1.5006161}, type = {article} @COMMENTBibtex file generated on