@inproceedingsFat2012, Author = {Fatikow, Sergej and Bartenwerfer, Malte and Eichhorn, Volkmar and Zimmermann, Sören and Krohs, Florian}, Title = {Automated Nanofabrication by a Combined Robotic SEM/AFM/FIB system}, Year = {2012}, Pages = {571-576}, Month = {03}, Address = {Northwestern University, IL, USA}, type = {inproceedings} @COMMENTBibtex file generated on