@inproceedingsElfert2016wafer, Author = {Elfert, Patrick and Bartenwerfer, Malte and Fatikow, Sergej}, Title = {Wafer-scale Automation of Electron Beam Induced Depositions}, Year = {2016}, Booktitle = {Proc. of IEEE International Conference on Advanced Intelligent Mechatronics (AIM) 2016}, type = {inproceedings} @COMMENTBibtex file generated on