@articleFat2008, Author = {Fatikow, S. and Wich, T. and Krohs, F. and Dahmen, C.}, Title = {Towards Automated Handling on the Nanoscale}, Year = {2008}, Month = {09}, type = {article}, note = { Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nanotechnology. controlled, reproducible operation on the nanoscale will enable high-throughput manufacturing of revolutionary products and open up new a}, Abstract = { Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nanotechnology. controlled, reproducible operation on the nanoscale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these research activities is the development of automated nanomanipulation processes to build a bridge between existing precise handling strategies for micro- and nano-scale objects and aspired high-throughput fabrication of micro- and nanosystems. This paper describes our current work on different problems of nanohandling automation, both by nanorobots inside a scanning electron microscope and by an atomic force microscope applied as a nanorobot.} @COMMENTBibtex file generated on