@inproceedingsBartenwerfer2011b, Author = {Bartenwerfer, M. and Fatikow, S. and Tunnell, R. and Mick, U. and Stolle, C. and Diederichs, C. and Jasper, D. and Eichhorn, V.}, Title = {Towards Automated AFM-based Nanomanipulation in a Combined Nanorobotic AFM/HRSEM/FIB System}, Year = {2011}, Pages = {171-176}, Month = {01}, Address = {Beijing, China}, Booktitle = {Proceedings of the IEEE International Conference on Mechatronics and Automation (ICMA'11)}, Doi = {10.1109/ICMA.2011.5985651}, type = {inproceedings} @COMMENTBibtex file generated on