@inproceedingsWan2006, Author = {Wang, Z. and Su, Sh. and Verevkin, Y.K. and Fatikow, S.}, Title = {Reference pattern-based 2D measurement with nano resolution}, Year = {2006}, Month = {10}, Booktitle = {6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East}, Organization = {SPIE}, chapter = {63760M}, type = {inproceedings} @COMMENTBibtex file generated on