@inproceedingsWan2006, Author = {Wang, Z. and Su, Sh. and Verevkin, Y.K. and Fatikow, S.},Title = {Reference pattern-based 2D measurement with nano resolution},Year = {2006},Month = {10},Booktitle = {6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East},Organization = {SPIE},chapter = {63760M},type = {inproceedings} @COMMENTBibtex file generated on