@inproceedingsWic2005, Author = {Wich, T. and Sievers, T. and Jähnisch, M. and Hülsen, H. and Fatikow, S.}, Title = {Nanohandling Automation within a Scanning Electron Microscope}, Year = {2005}, Pages = {1073-1078}, Month = {06}, Booktitle = {Proc. of IEEE International Symposium on Industrial Electronics (ISIE'05)}, type = {inproceedings} @COMMENTBibtex file generated on