@inproceedingsFat2003, Author = {Fatikow, S. and Shirinov, A. and Hülsen, H. and Garnica, S.}, Title = {Multimodal Control of a Microrobot in an SEM-Based Nanohandling Station}, Year = {2003}, Pages = {890-895}, Month = {10}, Booktitle = {Proc. of Int. IEEE Symp. on Intelligent Control}, type = {inproceedings} @COMMENTBibtex file generated on