@conferenceWal2017, Author = {Waldemar Klauser ; Malte Bartenwerfer ; Sergej Fatikow}, Title = { Multi template matching-based drift compensation for electron beam induced deposition }, Year = {2017}, Pages = {299 - 302 }, Publisher = {IEEE Xplore}, Series = {International Conference on Nanotechnology (IEEE-NANO) }, Booktitle = { Nanotechnology (IEEE-NANO), 2017 IEEE 17th International Conference on}, Organization = {IEEE}, Doi = { 10.1109/NANO.2017.8117258}, type = {conference} @COMMENTBibtex file generated on