@inproceedingsZen2003, Author = {Zenke, J. and Sill, A. and Fatikow, S. and Michler, J. and BĆ¼ttgenbach, S.}, Title = {Mechanical materials characterisation in a SEM}, Year = {2003}, Pages = {595-600}, Month = {10}, Booktitle = {Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003)}, type = {inproceedings} @COMMENTBibtex file generated on