@articleJas2010, Author = {Jasper, Daniel and Fatikow, Sergej}, Title = {Line Scan-based High-Speed Position Tracking inside the SEM}, Year = {2010}, Pages = {115-135}, Month = {06}, Edition = {4}, Isbn = {1559-9612}, Booktitle = {Internationl Journal of Optomechatronics}, type = {article} @COMMENTBibtex file generated on