@inproceedingsSie2006, Author = {Sievers, T.}, Title = {Global sensor feedback for automatic nanohandling inside a scanning electron microscope}, Year = {2006}, Pages = {289-294}, Month = {07}, Isbn = {-}, Booktitle = {Proc. of 2nd I*PROMS NoE Virtual International Conference on Intelligent Production Machines and Systems}, type = {inproceedings} @COMMENTBibtex file generated on