@articleVoi2008, Author = {Voigt, F. and Gerbach, R. and Krohs, F.},Title = {Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining},Year = {2008},Month = {03},Edition = {27/2},Booktitle = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures},type = {article} @COMMENTBibtex file generated on