@articleVoi2008, Author = {Voigt, F. and Gerbach, R. and Krohs, F.}, Title = {Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining}, Year = {2008}, Month = {03}, Edition = {27/2}, Booktitle = {Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures}, type = {article} @COMMENTBibtex file generated on