@inproceedingsFat2007, Author = {Fatikow, S. and Eichhorn, V. and Krohs, Fl. and Stolle, C. and Hagemann, S.}, Title = {Development of an automated microrobot station for nanocharacterization}, Year = {2007}, Pages = {6589-54}, Month = {05}, Booktitle = {SPIE Conference - Microtechnologies for the New Millennium}, type = {inproceedings} @COMMENTBibtex file generated on