@inproceedingsFat2006, Author = {Fatikow, S. and Wich, T. and Kray, S. and Hülsen, H. and Sievers, T. and Jähnisch, M. and Eichhorn, V.}, Title = {Automatic Nanohandling Station inside a Scanning Electron Microscope}, Year = {2006}, Pages = {17-22}, Month = {09}, Booktitle = {2nd Int. Conference in Multi-Material Micro Manufacture (4M)}, type = {inproceedings} @COMMENTBibtex file generated on