@inproceedings F.2014, Author = { F. Krohs, O.C. Haenssler, M. Bartenwerfer; S. Fatikow}, Title = { Atomic force microscopy for high resolution sidewall scans}, Year = {2014}, Pages = {4}, Month = {10}, Booktitle = {Int. Conf. on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)}, Doi = {10.1109/3M-NANO.2014.7057303}, type = {inproceedings} @COMMENTBibtex file generated on