@inproceedingsKla2016, Author = {Klauser, W. and Bartenwerfer, M. and Elfert, P. and Krauskopf, J. E. and Fatikow, S.}, Title = {Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition}, Year = {2016}, Pages = {1-4}, Booktitle = {Proc. of Micro-Nano-Integration}, type = {inproceedings} @COMMENTBibtex file generated on