Prof. Dr.-Ing. Sergej Fatikow Scientific Director R&D Division Health

Prof. Dr.-Ing. Sergej Fatikow
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Scientific Director R&D Division Health

Research and Developement Division

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+49 441 798-4260

+49 441 798-4267

fatikow(at)uni-oldenburg.de

www.amir.uni-oldenburg.de

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Publications
of Prof. Dr.-Ing. Sergej Fatikow

2018

Design and experimental evaluation of a compliant mechanism-based stepping-motion actuator with multi-mode

J. Wei, S. Fatikow, X. Zhang, O.C. Haenssler; Smart Mater. Struct.; 09 / 2018

DOI
Manipulation of Liquid Metal Inside an SEM by Taking Advantage of Electromigration

F.T. von Kleist-Retzow , O.C. Haenssler, S. Fatikow; J. of Micromechanical Systems; 11 / 2018

DOI
Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors

O.C. Haenssler, S. Fatikow, D. Théron; J. of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena; 01 / 2018

DOI
Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy

O.C. Haenssler, M.F. Wieghaus, A. Kostopoulos, G. Doundoulakis, E.Aperathitis, S.Fatikow, G.Kiriakidis; J. of Micro-Bio Robotics; 06 / 2018

DOI

2017

Combining Scanning Microscopy and Robotics: Automated Analysis and Manipulation on the Small Scale

M. Bartenwerfer, T. Tiemerding, O.C. Haenssler, S. Fatikow; Int. Conf. on Manipulation, Automation and Robotics at Small Scales (MARSS), 2017; 07 / 2017

DOI
Test standard for Light, Electron and Microwave Microscopy to enable robotic processes

O.C. Haenssler, A. Kostopoulos, G. Doundoulakis, E. Aperathitis, S. Fatikow, G. Kiriakidis; Int. Conf. on Manipulation, Automation and Robotics at Small Scales (MARSS), 2017; 07 / 2017

DOI

2016

Cubical photonic structures by means of ion beam assisted robotic assembly

Klauser, W. and Zimmermann, S. and Bartenwerfer, M. and Fatikow, S.; IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS); 2016

Integration of different hardware interfacing protocols into a robotic software framework

Elfert, P. and Tiemerding, T. and Fatikow, S.; Proceedings of Int. Conf. on Manipulation, Automation and Robotics at Small Scales (MARSS); 2016

DOI
Modularized SPM-Controller based on an FPGA for combined AFM and SMM measurements

M.F. Wieghaus, T. Tiemerding, O.C. Haenssler, S. Fatikow; Int. Conf. on Manipulation, Automation and Robotics at Small Scales (MARSS), 2016; 07 / 2016

DOI
Nano-granular Layers for Sensor Applications fabricated by Means of Electron Beam induced Deposition

Klauser, W. and Bartenwerfer, M. and Elfert, P. and Krauskopf, J. E. and Fatikow, S.; Proc. of Micro-Nano-Integration; October / 2016

Simulation of Probe Misalignment Effects during RF On-Wafer Probing

F.T. von Kleist-Retzow, O.C. Haenssler, S. Fatikow; 41st Int. Conf. on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2016; 09 / 2016

DOI
Towards Remote Telecontrol of a Desktop Microfactory via Internet Protocol with Virtual Reality

Tiemerding, T. and Mikczinski, M. and Fatikow, S.; Proc. of International Workshop on Microfactories (IWMF); 2016

Wafer-scale Automation of Electron Beam Induced Depositions

Elfert, Patrick and Bartenwerfer, Malte and Fatikow, Sergej; Proc. of IEEE International Conference on Advanced Intelligent Mechatronics (AIM) 2016; 2016

2015

Automated robotic manipulation of individual sub-micro particles using a dual probe setup inside the scanning electron microscope

S. Zimmermann; T. Tiemerding; O.C. Haenssler; S. Fatikow; IEEE International Conference on Robotics and Automation (ICRA), 2015; 2015

Manipulating and Characterizing with Nanorobotics: In-situ SEM technique for Centimeter and Millimeter Waves

O.C. Haenssler, S. Fatikow; 40th Int. Conf. on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2015; 08 / 2015

DOI

2014

Atomic force microscopy for high resolution sidewall scans

F. Krohs, O.C. Haenssler, M. Bartenwerfer; S. Fatikow; Int. Conf. on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO); 10 / 2014

DOI

2013

A Rapid Automation Framework for Applications on the Micro- and Nanoscale

Diederichs, Claas and Bartenwerfer, Malte and Mikczinski, Manuel and Zimmermann, Sören and Tiemerding, Tobias and Geldmann, Christian and Nguyen, Ha and Dahmen, Christian and Fatikow, Sergej; Proceedings of Australasian Conference on Robotics and Automation; 12 / 2013

Assessing Transverse Fibre Properties: Compression and Artificial Hornification by Periodic Compression

Mikczinski, Manuel and Nguyen, Ha Xuan and Fatikow, Sergej; Advances in Pulp and Paper Research, Transactions of the XVth Fundamental Research Symposium, Cambridge, 2013; 2013

Automated mechanical characterization of 2D materials using SEM based visual servoing

Zimmermann, Sören and Tiemerding, Tobias and Fatikow, Sergej and Wang, W. and Li, T. and Wang, Y.; Proceedings of the 3M-NANO Conference; 8 / 2013

Closing the Loop: High-Speed Visual Servoing and Control of a commercial Nanostage inside the SEM

Tiemerding, Tobias and Diederichs, Claas and Zimmermann, Sören and Fatikow, Sergej; Proceedings of the 3rd 3M-NANO Conference; 8 / 2013

Comparison of SystemC and VHDL based Design of Image Processing Systems

Tiemerding, T. and Diederichs, Claas and Herrholz, Andreas and Fatikow, Sergej; Proceedings of Embedded World 2013; 2013

Design of a Micro-Cartridge System for the Robotic Assembly of Exchangeable AFM-Probe Tips

Bartenwerfer, Malte and Eichhorn, Volkmar and Fatikow, Sergej and Becker, M. and Savenko, A. and Yildiz, I. and Bøggild, Peter; Proceedings of IEEE International Conference on Robotics and Automation (ICRA); 2013

Design, identification and control of a 2-DOF flexure-based mechanism for micro/nano manipulation

Li, X. and Tian, Y. and Qin, Y. and Wang, F. and Gao, W. and Zhang, D. and Eichhorn, V. and Fatikow, S.; Nanoscience and Nanotechnology Letters; 2013

Evaluation of different Design Methodologies of Hardware-based Image Processing for Automation in Microrobotics

Tiemerding, T. and Diederichs, C. and Stehno, C. and Fatikow, S.; Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM); 2013

FPGA-Based Object Detection and Motion Tracking in Micro- and Nanorobotics

Diederichs, Claas and Fatikow, Sergej; International Journal of Intelligent Mechatronics and Robotics; 2013

In situ SEM electromechanical characterization of nanowire using an electrostatic tensile device

Hongjiang Zeng and Tie Li and Malte Bartenwerfer and Sergej Fatikow and Yuelin Wang; Journal of Physics D: Applied Physics ; 2013

URL
Investigation of aged fibre-fibre bonds with micro and nanorobotic tools

Saketi, P. and Mikczinski, Manuel and Fatikow, Sergej and Kallio, P. ; Advances in Pulp and Paper Research, Transactions of the XVth Fundamental Research Symposium, Cambridge, 2013; 2013

Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials

Fatikow, Sergej and Eichhorn, Volkmar and Bartenwerfer, Malte and Krohs, Florian; Emerging Technologies Factory Automation (ETFA), 2013 IEEE 18th Conference on; 2013

DOI
Nonlinear viscoelastic modeling of stylus probing for surface metrology

Tian, Y. and Liu, X. and Chetwynd, D. and Eichhorn, S. and Fatikow, S. and Zhang, D.; Precision Engineering; 2013

Robotic Nanowire Handling for Prototypic NEMS Devices

Bartenwerfer, Malte and Fatikow, Sergej; Proceedings of IEEE International Conference on Robotics and Automation (ICRA); 2013

Robotic Nanowire Handling for Prototypic NEMS Switching and Resonator Devices

Bartenwerfer, Malte and Fatikow, Sergej; Proceedings of IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS); 2013

Simultaneous Characterization of Mechanical and Electrical Properties of Nanowire Using MEMS Device

Zeng, H. and Li, T. and Bartenwerfer, M. and Fatikow, S. and Wang, Y.; Proceedings of IEEE Transducers & Eurosensors XXVII; 2013

2012

A flexible microrobotic platform for handling microscale specimens of fibrous materials for microscopic studies

Saketi, Pooya and Essen, Mathias von and Mikczinski, Manuel and Heinemann, Sabine and Fatikow, Sergej and Kallio, Pasi; 01 / 2012

Automated Nanofabrication by a Combined Robotic SEM/AFM/FIB system

Fatikow, Sergej and Bartenwerfer, Malte and Eichhorn, Volkmar and Zimmermann, Sören and Krohs, Florian; 03 / 2012

Mechanical properties of boron nitride nanocones

Tian, Y. and Wei, R. and Eichhorn, V. and Fatikow, S. and Shirinzadeh, B. and Zhang, D.; Journal of Applied Physics; 05 / 2012

DOI
Nanomaterials Enter the Silicon-Based CMOS Era - Nanorobotic technologies for nanoelectronic devices.

Fatikow, Sergej and Eichhorn, Volkmar and Bartenwerfer, Malte; IEEE Nanotechnology Magazine; 03 / 2012

Towards High Density Biosensors for Mobile Diagnostics

M. Weigel-Jech, O.C. Haenssler, S. Fatikow; 10 / 2012

DOI

2011

Auto-configuration and self-calibration in flexible robot-based micro-/nanohandling cells

Fatikow, Sergej and Stolle, Christian and Diederichs, Claas and Jasper, Daniel; 09 / 2011

Automated Handling and Assembly of Customizable AFM-Tips

Bartenwerfer, M. and Eichhorn, V. and Jasper, D. and Fatikow, S. and Savenko, A. and Petersen, D.~H. and Malm, B. and Bøggild, P.; Proccedings of the IEEE International Symposium on Assembly and Manufacturing (ISAM'11); 01 / 2011

DOI
Automatisierte Handhabung und Montage von anpassbaren AFM-Messspitzen

Bartenwerfer, M. and Eichhorn, V. and Jasper, D. and Fatikow, S.; Proceedings of the 3rd GMM Workshop on Micro-Nano-Integration; 01 / 2011

Design and Control of a Nanohandling Robot

Fatikow, S. and Edeler, C. and Diederichs, C. and Meyer, I. and Jasper, D.; 06 / 2011

Hybrid FIB/SEM/SPM System Used for In-situ Analysis of Milling Process on Metallic Thin Films

Král, Z. and Urbánek, M. and Mick, U. and Eichhorn, V. and Fatikow, S. and Petrenec, M. and Jiruse, J. and Kolíbalová, E. and Zadrazil, M.; Proceedings of the 3M-NANO Conference; 01 / 2011

Nanorobotic Assembly and Focused Ion Beam Processing of Nanotube-enhanced AFM Probes

Fatikow, S. and Bartenwerfer, M. and Eichhorn, V.; Proceedings of the 3M-NANO Conference; 01 / 2011

Open Loop Force Control of Stick-Slip Drives

Edeler, C. and Fatikow, S.; 03 / 2011

Towards Automated AFM-based Nanomanipulation in a Combined Nanorobotic AFM/HRSEM/FIB System

Bartenwerfer, M. and Fatikow, S. and Tunnell, R. and Mick, U. and Stolle, C. and Diederichs, C. and Jasper, D. and Eichhorn, V.; Proceedings of the IEEE International Conference on Mechatronics and Automation (ICMA'11); 01 / 2011

DOI

2010

AFM as a Robot for Automated Nanohandling

Fatikow, Sergej and Bartenwerfer, Malte and Mick, Uwe and Niewiera, Florian and Weigel-Jech, Michael and Krohs, Florian; 10 / 2010

Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes

Wich, T. and Stolle, C. and Mikczinski, M. and Fatikow, S.; IFIP Advances in Information and Communication Technology; 01 / 2010

Automated Handling of Bio-Nanowires for Nanopackaging

S. Fatikow, M. Bartenwerfer, F. Krohs, M. Mikczinski, F. Niewiera, M. Weigel-Jech, P. Saketi, P. Kallio; 10 / 2010

Automated Nanorobotic Handling of Bio- and Nano-Materials

Fatikow, S. and Eichhorn, V. and Jasper, D. and Weigel-Jech, M. and Niewiera, F. and Krohs, F.; 08 / 2010

Combined Nanorobotic AFM/SEM System as Novel Toolbox for Automated Hybrid Analysis and Manipulation of Nanoscale Objects

Mick, U. and Eichhorn, V. and Wortmann, T. and Diederichs, C. and Fatikow, S.; 05 / 2010

Development of a novel process chain based on Atomic Force Microscopy scratching for small and medium series production of polymer nano structured components

Brousseau, E. B. and Krohs, F. and Caillaud, E. and Dimov, S. and Gibaru, O. and Fatikow, S.; ASME Journal of Manufacturing Science and Engineering; 03 / 2010

Fast and Accurate Pick-and-Place Automation with Nanorobots

Edeler, Christoph and Jasper, Daniel and Diederichs, Claas and Fatikow, Sergej; 06 / 2010

Hardware-based, Trajectory-Controlled Visual Servoing of Mobile Microrobots

Jasper, Daniel and Diederichs, Claas and Fatikow, Sergej; 09 / 2010

High-speed Nanorobot Control in SEM

Jasper, D. and Diederichs, C. and Edeler, C. and Fatikow, S.; 03 / 2010

Magnetic Resonance Imaging of Magnetic Particles for Targeted Drug Delivery

Dahmen, C. and Wortmann, T. and Fatikow, S.; 02 / 2010

Micro-/Nano-Integration for MEMS based on nano-robotic assembly

Wich, T. and Mikczinski, M. and Fatikow, S.; ISR/ROBOTIK 2010; 01 / 2010

NanoBits: Exchangeable and customizable scanning probe tips as a versatile tool for nanoscale applications

Eichhorn, V. and Jasper, D. and Krohs, F. and Bøggild, P. and Fahlbusch, S. and Oliva, M. and Krause, O. and Haschke, H. and Fatikow, S.; 10 / 2010

Nanohandling Robot Cells

Fatikow, S. and Wich, T. and Dahmen, C. and Jasper, D. and Stolle, C. and Eichhorn, V. and Hagemann, S. and Weigel-Jech, M.; Handbook of Nanophysics; 09 / 2010

Nanorobotic Strategy for Nondestructive Mechanical Characterization of Carbon Nanotubes

Eichhorn, V. and Bartenwerfer, M. and Fatikow, S.; Bentham Journal Micro and Nanosystems; 03 / 2010

Novel Four-Point-Probe Design and Nanorobotic Dual Endeffector Strategy for Electrical Characterization of As-grown SWCNT-Bundles

Eichhorn, V. and Fatikow, S. and Sardan Sukas, O. and Hansen, T.M. and Bøggild, P. and Occhipinti, L.G.; 05 / 2010

Simulation and Measurements of Stick-Slip-Microdrives for Nanorobots

Edeler, Christoph and Meyer, Ingo and Fatikow, Sergej; 09 / 2010

2009

A Nanorobotic System for Automated Pick-and-Place Handling and Characterization of CNTs

Eichhorn and Fatikow and Wortmann and Stolle and Edeler and Jasper and Sardan and Bøggild and Boetsch and Canales and Clavel; 05 / 2009

A Nanorobotic System for Automated Pick-and-Place Handling and Characterization of CNTs

Eichhorn, V. and Fatikow, S. and Wortmann, T. and Stolle, C. and Edeler, C. and Jasper, D. and Sardan, O. and Bøggild, P. and Boetsch, G. and Canales, C. and Clavel, R.; 05 / 2009

Advanced Atomic Force Microscope based System for Manipulation at the Nanoscale

Krohs, F. and Weigel-Jech, M. and Mick, U. and Isken, M. and Fatikow, S. and ; Proceedings of the 9th International IFAC Symposium on Robot Control (SYROCO2009); 09 / 2009

Automated Nanorobotic Systems

Jasper, D. and Edeler, C. and Diederichs, C. and Naroska, M. and Stolle, C. and Fatikow, S.; 07 / 2009

Carbon Nanotube Detection by Scanning Electron Microscopy

Wortmann, T. and Fatikow, S.; 05 / 2009

Investigation of a new process chain based on atomic force microscopy scratching

Brousseau, E. and Krohs, F. and Griffiths, A. and Scholz, S. and Fatikow, S.; 10 / 2009

Micro-nano-integration based on automated serial assembly

Wich, T. and Edeler, C. and Stolle, C. and Fatikow, S.; 08 / 2009

Multisensor Soft Tissue Navigation for the Controlled Guidance in Intra-Cardiac Microsurgery

Brell, M. and Isken, M. and Hein, A. and Dahmen, C. and Tunnell, R. and Wortmann, T. and Sill, A. and Fatikow, S. and Bombien, R. and Lutter, G. and Leester-Schädel, M. and Büttgenbach, S.; Surgery, Mimimal Invasive Interventions, Endoscopy and Image Guided Therapy; 09 / 2009

Nanobits: customisable scanning probe tips

Rajendra Kumar, R. T. and Hassan, S. U. and Sardan, O. and Eichhorn, V. and Fatikow, S. and Krohs, F. and Bøggild, P.; IOP Nanotechnology; 09 / 2009

Parasitic Effects on Nanoassembly Processes

Wich, T. and Stolle, C. and Edeler, C. and Fatikow, S.; 10 / 2009

Towards Automated Nanoassembly With the Atomic Force Microscope: A Versatile Drift Compensation Procedure

Krohs, F. and Onal, C. and Sitti, M. and Fatikow, S.; ASME Journal of Dynamic Systems, Measurement, and Control; 11 / 2009

Towards automated robot-based nanohandling

Fatikow, S. and Wortmann, T. and Mikczinski, M. and Dahmen, C. and Stolle, C.; Chinese Control and Decision Conference 2009; 01 / 2009

Visual Feedback Methods for Nanohandling Automation

Fatikow, S. and Dahmen, C. and Wortmann, T. and Tunnell, R.; International Journal of Information Acquisition; 09 / 2009

2008

Automated Microfactory inside a Scanning Electron Microscope

Eichhorn, V. and Fatikow, S. and Dahmen, C. and Edeler, C. and Stolle, C. and Jasper, D.; 10 / 2008

Automated Nano-Assembly in the SEM: Challenges in Setting up a Warehouse

Wich, T. and Stolle, C and Frick, O. and Fatikow, S.; Proc. of the 17th IFAC World Congress; 07 / 2008

Automated Nanohandling by Microrobots

Fatikow, Sergej; Automated Nanohandling by Microrobots; 01 / 2008

CameraMan: A Multirobot System for Nanohandling in a Scanning Electron Microscope

Fatikow, S and Jasper, D. and Edeler, C. and Dahmen, C.; Proc. Of the IEEE International Conference on Robotics and Automation; 05 / 2008

Depth-Detection Methods for Microgripper based CNT Manipulation in a Scanning Electron Microscope

Eichhorn, V. and Fatikow, S. and Wich, T. and Dahmen, C. and Sievers, T. and Andersen, K.N. and Carlson, K. and Bøggild, P.; 01 / 2008

Development, Control and Evaluation of a Mobile Platform for Microrobots

Edeler, C. and Jasper, D and Fatikow, S.; Proc. of the 17th IFAC World Congress; 07 / 2008

Development, Control and Evaluation of a Mobile Platform for Microrobots

Edeler, C. and Jasper, D. and Fatikow, S.; 06 / 2008

Electrothermal microgrippers for pick-and-place operations

Nordström Andersen, K. and Petersen, D.H. and Carlson, K. and Mølhave, K. and Sardan, Ö. and Horsewell, A. and Eichhorn, V. and Fatikow, S. and Bu, I. and Teo, K. and Milne, W. I. and Bøggild, P.; 01 / 2008

Flexible visual feedback for automated nanohandling inside an SEM

Fatikow, S. and Jasper, D. and Edeler, C. and Dahmen, C.; 11 / 2008

Multimodal Electrothermal Silicon Microgrippers for Manipulation

Andersen, K. N. and Petersen, D. H. and Carlson, K. and Mølhave, K. and Sardan, O. and Horsewell, A. and Eichhorn, V. and Fatikow, S. and Bøggild, P.; 01 / 2008

Nanohandling Automation: Trends and Current Developments

Fatikow, Sergej and Eichhorn, Volkmar; 01 / 2008

Simulation and Experimental Evaluation of Laser-Structured Actuators for a Mobile Microrobot

Edeler, C. and Fatikow, S.; Proc. Of the IEEE International Conference on Robotics and Automation; 05 / 2008

Towards Automated Handling on the Nanoscale

Fatikow, S. and Wich, T. and Krohs, F. and Dahmen, C.; 09 / 2008

Towards automation in AFM based nanomanipulation and electron beam induced deposition for microstructuring

Krohs, F. and Luttermann, T. and Stolle, C. and Fatikow, S. and Brousseau, E. and Dimov, S.; Proceedings of the 4th International Conference on Multi-Material Micro Manufacture; 09 / 2008

2007

A carbon nanofibre scanning probe assembled using an electrothermal microgripper

Carlson, K. and Andersen, K.N. and Eichhorn, V. and Petersen, D.H. and Mølhave, K. and Bu, I.Y.Y. and Teo, K.B.K. and Milne, W.I. and Fatikow, S. and Bøggild, P.; 08 / 2007

Automated Cell Characterization by a nanohandling robot station

Krohs, Florian and Hagemann, Saskia and Fatikow, Sergej; 06 / 2007

Automated cell characterization by a nanohandling robot station

Krohs, F., Hagemann, S., Fatikow, S.; 06 / 2007

Automated Characterization and Manipulation of Biological Cells by a Nanohandling Robot Station

Hagemann, Saskia and Krohs, Florian and Fatikow, Sergej; 03 / 2007

CameraMan - Nanohandling Robot Cell inside

Jasper, D. and Fatikow, S.; 10 / 2007

Control system for an AFM based nanomanipulation station

Krohs, F. and Hagemann, S. and Oterob, J. and Puig-Vidal, M. and Fatikow, S.; 10 / 2007

Control system for an AFM based nanomanipulation station

Krohs, Florian and Hagemann, Saskia and Otero, Jorge and Puig-Vidal, Manel and Fatikow, Sergej; Proceedings of SPIE, the International Society for Optical Engineering; 10 / 2007

Control System of an Automated Nanohandling Robot Cell

Stolle, C. and Fatikow, S.; 22nd IEEE International Symposium on Intelligent Control (ISIC); 10 / 2007

Depth-Detection Methods for CNT Manipulation and Characterization in a Scanning Electron Microscope

Fatikow, S. and Eichhorn, V. and Wich, T. and Sievers, T. and Hänßler, O. and Norstrøm, K. Andersen; IEEE International Conference on Mechatronics and Automation (ICMA); 08 / 2007

Development of an Automated Desktop Station for EBiD-based Nano-Assembly

Luttermann, T. and Wich, T. and Stolle, C. and Fatikow, S.; 2nd International Conference on Micro-Manufacturing (ICOMM-2007); 09 / 2007

Development of an automated microrobot station for nanocharacterization

Fatikow, S. and Eichhorn, V. and Krohs, Fl. and Stolle, C. and Hagemann, S.; SPIE Conference - Microtechnologies for the New Millennium; 05 / 2007

Development of an automated microrobot station for nanocharacterization

Fatikow, S. and Eichhorn, V. and Krohs, F. and Mircea, I. and Stolle, C. and Hagemann, S.; 05 / 2007

Development of automated microrobot-based nanohandling stations for nanocharacterization

Fatikow, S. and Eichhorn, V. and Krohs, F. and Mircea, I. and Stolle, C. and Hagemann, S.; Microsystem Technologies; 11 / 2007

Electrothermal microgrippers for pick and place operations

Andersen, K. N. and Carlson, K. and Petersen, D. H. and Mølhave, K. and Eichhorn, V. and Fatikow, S. and Bøggild, P.; 33rd International Conference on Micro- and Nano-Engineering (MNE07); 09 / 2007

Improving AFM microbial cell nanomanipulation by the use of a nanohandling microrobot

Otero, Jordi and Puig-Vidal, Manel and Hagemann, Saskia, Krohs, Florian and Fatikow, Sergej and ; 04 / 2007

Microrobot-based Nanoindentation of an Epoxy-based Electrically Conductive Adhesive

Mircea, J. and Fatikow, S. and Sill, A.; IEEE NANO-Conference; 08 / 2007

NanoHand: micro-nano system for automatic handling of nano-objects

Fatikow, S and Eichhorn, V. and Sill, A. and Steinecker, A. and Meyer, C. and Occhipinti, L. and Fahlbusch, S. and Utke, I. and Bøggild. P. and Breguet, J.-M. and Kaufmann, R. and Zadrazil, R. and Barth, W.; International Syposium on Optomechatronic Technologies (ISOT 2007); 10 / 2007

Nanorobotic Manipulation Setup for Pick-and-Place Handling and Nondestructive Characterization of Carbon Nanotubes

Eichhorn, V. and Carlson, K. and Andersen, K. N. and Fatikow, S. and Bøggild, P.; IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2007); 10 / 2007

Robotic Nanoassembly

Wang, Z. and Fatikow, S. and Su, Sh. and Yang, M. and Hülsen, H.; IEEE International Conference on Mechatronics and Automation (ICMA); 08 / 2007

Trends in Nanohandling

Fatikow, S. and Eichhorn, V. and Sill, A.; Mikrosystemtechnik Kongress Dresden 2007; 10 / 2007

2006

AFM probe-based nanohandling robot station for the Characterization of CNTs and biological cells

Fatikow, Sergej and Eichhorn, Volkmar and Hagemann, Saskia and Hülsen, Helge; 5th Int. Workshop on Microfactories (IWMF); 10 / 2006

Assembly inside a Scanning Electron Microscope using Electron Beam induced Deposition

Wich, T. and Sievers, T. and Fatikow, S.; IEEE Int. Conference on Intelligent Robots and Systems (IROS); 10 / 2006

Assembly tasks inside an SEM

Wich, T. and Fatikow, S.; Int. Conference on Robotics: Science and Systems; 08 / 2006

Automatic Nanohandling Station inside a Scanning Electron Microscope

Fatikow, S. and Wich, T. and Kray, S. and Hülsen, H. and Sievers, T. and Jähnisch, M. and Eichhorn, V.; 2nd Int. Conference in Multi-Material Micro Manufacture (4M); 09 / 2006

Development and Control of a Versatile Nanohandling Robot Cell

Fatikow, S. and Eichhorn, V. and Schrader, C. and Stolle, C. and Sievers, T. and Jähnisch, M.; 8th International IFAC Symposium on Robot Control (SYROCO); 09 / 2006

Development of a Nanohandling Robot Station for Nanocharacterization by an AFM Probe

Fatikow, S. and Kray, S. and Eichhorn, V. and Tautz, S.; IEEE Mediterranean Conference on Control and Automation (MED); 06 / 2006

Development of an automatic nanorobot cell for handling of Carbon Nanotubes

V. Eichhorn, T. Wich, H. Hülsen, O. Haenssler, T. Sievers, S. Fatikow; MICRO & NANO ROBOTICS; 10 / 2006

Impact of Center of Gravity in Quadrotor Helicopter Controller Design

Kemper, M. and Fatikow, S.; Proc. of Mechatronics 2006; 09 / 2006

Microrobot based testing of nanostructures inside an SEM

Kray, S. and Wich, T. and Fatikow, S.; Int. Conference on New Actuators; 06 / 2006

Microrobot System for Automatic Nanohandling inside a Scanning Electron Microscope

Fatikow, S. and Wich, T. and Hülsen, H. and Sievers, T. and Jähnisch, M.; IEEE Int. Conference on Robotics and Automation (ICRA); 05 / 2006

Mikroroboter weisen den Weg

Fatikow, S.; 01 / 2006

Reference pattern-based 2D measurement with nano resolution

Wang, Z. and Su, Sh. and Verevkin, Y.K. and Fatikow, S.; 6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East; 10 / 2006

Self-Organising Locally Interpolating Map for the control of mobile microrobots

Hülsen, H. and Fatikow, S. and Pham, D.T. and Wang, Z.; Proc. Virtual Int. Conference on Intelligent Production Machines and Systems (IPROMS'06); 07 / 2006

Vision feedback in an automatic nanohandling station inside an SEM

Sievers, T. and Jähnisch, M. and Schrader, C. and Fatikow, S.; 6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East; 10 / 2006

2005

Automatic Nanohandling Station inside an SEM

Fatikow, S. and Wich, T. and Sievers, T. and Hülsen, H.; Topical Meeting of Microfacotories for MEMS and Nanofactories; 10 / 2005

Control System of a Nanohandling Cell within a Scanning Electron Microscope

Jähnisch, M. and Hülsen, H. and Sievers, T. and Fatikow, S.; Proc. of 13th Mediterranean Conference on Control and Automation (MED'05); 06 / 2005

Development of mobile versatile nanohandling microrobots: design, driving principles, haptic control

Kortschack, A. and Shirinov, A. and Trüper, T. and Fatikow, S.; 01 / 2005

Extrapolation with a self-organising locally interpolating map

Hülsen, Helge and Fatikow, Sergej; Proc. of the 2nd International Conference on Informatics in Control, Automation and Robotics (ICINCO); 09 / 2005

Microrobot station for automatic cell handling

Sievers, T. and Garnica, S. and Tautz, S. and Trüper, T. and Fatikow, S.; ICGST International Conference on Automation, Robotics and Autonomous Systems (ARAS-05); 12 / 2005

Nanohandling Automation within a Scanning Electron Microscope

Wich, T. and Sievers, T. and Jähnisch, M. and Hülsen, H. and Fatikow, S.; Proc. of IEEE International Symposium on Industrial Electronics (ISIE'05); 06 / 2005

Pose estimation of mobile microrobots in a Scanning electron microscope

Sievers, T. and Fatikow, S.; Proc. of the 2nd International Conference on Informatics in Control, Automation and Robotics (ICINCO); 09 / 2005

Robotised Nanomanufacturing: Current Developments and Future Trends

Pham, D.T. and Wang, Z. and Su, S. and Pham, P.T.N. and Yang, M., Fatikow, S.; 01 / 2005

Visual Servoing of a Mobile Microrobot inside a Scanning Electron Microscope

Sievers, T. and Fatikow, S.; Proc. of IEEE Int. Conference of Intelligent Robots and Systems (IROS); 08 / 2005

2004

A Navigation System Concept for an Indoor Micro Air Vehicle

Eich, M. and Kemper, M., Fatikow, S.; First European Micro Air Vehicle Conference and Flight Competition; 06 / 2004

Control System for the automatic Handling of biological Cells with mobile Microrobots

Hülsen, H. and Trüper, T. and Fatikow, S.; Proc. American Control Conference (ACC'04); 07 / 2004

Development of a mobile nanohandling robot

Kortschack, A. and Fatikow, S.; 01 / 2004

Development of a Novel Low-Cost Microindenter

Kemper, M. and Zenke, J. and Fatikow, S.; 9th Int. Conf. on New Actuators; 06 / 2004

Haptic Interface for a Nanohandling Robot

Shirinov, A. and Kamenik, J and Fatikow, S.; 03 / 2004

Towards fully automated Microhandling

Fatikow, S. and Kortschack, A. and Hülsen, H. and Sievers, T. and Wich, T.; Proc. Int. Workshop on Microfactories (IWMF'04); 10 / 2004

Transporting cells with mobile microrobots

Trüper, T. and Kortschack, A. and Jähnisch and M. and Hülsen, H. and Fatikow, S.; IEE Proc.-Nanobiotechnology; 08 / 2004

Versatile Nanohandling Robot Cell in a Scanning Electron Microscope

Fatikow, S. and Kemper and M. and Kortschack, A. and Sievers, T. and Zenke, J. and Shirinov, A. and Hohn, S.; Proc. of 12th Mediterranean Conf. on Control and Automation; 06 / 2004

2003

A Rotorcraft Micro Air Vehicle for Indoor Applications

Kemper, M. and Merkel, M. and Fatikow, S.; Proc. of 11th Int. IEEE Conf. on Advanced Robotics; 06 / 2003

Attitude Control System for a Rotorcraft Micro Air Vehicle for Indoor Applications

Kemper, M. and Merkel, M. and Fatikow, S.; Proc. of 18. Bristol Int. Conf. on Unmanned Air Vehicle Systems; 04 / 2003

Control System of a Nanohandling Robot inside a Scanning Electron Microscope

Garnica, S. and Hülsen, H. and Kalagin, I. and Fatikow, S.; Proc. of 5. Int. Workshop on Computer Science and Information Technologies; 09 / 2003

Development of a Control System for a Microrobot-Based Nanohandling Station

Garnica, S. and Hulsen, H. and Fatikow, S.; Proc. of 7th Int. IFAC Symp. on Robot Control (SYROCO); 09 / 2003

Development of a haptic interface for a nanohandling robot cell

Shirinov, A. and Fatikow, S.; Proc. of Eurohaptics; 07 / 2003

Development of a nanohandling robot cell

Fahlbusch, S. and Fatikow, S. and Garnica, S. and Huelsen, Helge and Kortschack, A.; Proc. of the 11th Mediterranean Conference on Control and Automation; 06 / 2003

Driving principles of Mobile Microrobots for the Micro- and Nanohandling

A. Kortschack, O. Haenssler, C. Rass, S. Fatikow; Proc. of IEEE/RSJ Int. Conference of Intelligent Robots and Systems (IROS); 10 / 2003

Extended Kohonen Networks for the Pose Control of Microrobots in a Nanohandling Station

Hulsen, H. and Garnica, S. and Fatikow, S.; Proc. of Int. IEEE Symp. on Intelligent Control; 10 / 2003

Fuzzy Logic-based Control Algorithm for a Nanohandling Microrobot

Kalagin, I. and Hülsen, H. and Fatikow, S.; Proc. of 5. Int. Workshop on Computer Science and Information Technologies; 09 / 2003

Mechanical materials characterisation in a SEM

Zenke, J. and Sill, A. and Fatikow, S. and Michler, J. and Büttgenbach, S.; Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003); 10 / 2003

Multi-Modal Control Interface for a Microrobot-Based Nanohandling Cell

Garnica, S. and Shirinov, A. and Sievers, T. and Kamenik, J. and John, R. and Haenssler, O. and Fatikow, S.; Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003); 10 / 2003

Multimodal control interface of a nanohandling robot in a scanning electron microscope

Fatikow, S. and Shirinov, A.; Proc. of Int. Conf. on Human-Computer Interaction; 06 / 2003

Multimodal Control of a Microrobot in an SEM-Based Nanohandling Station

Fatikow, S. and Shirinov, A. and Hülsen, H. and Garnica, S.; Proc. of Int. IEEE Symp. on Intelligent Control; 10 / 2003

Stable Teleoperation of Nanobandling Microrobots by Using a Haptic-Based Human-Machine Interface

Shirinov, A. and Fatikow, S.; Proc. of 10th Biomedical Science and Technology Symposium; 10 / 2003

Transporting and Sorting of Cells with Microrobots

Trüper, T. and Kortschack, A. and Jähnisch, M. and Hülsen, H. and Fatikow, S.; Proc of 2nd VDE World Microtechnologies Congress (MICRO.tec 2003); 10 / 2003

Versatile Microrobot System for Operating Inside a Scanning Electron Microscope

Fatikow, S. and Kortschack, A. and Fahlbusch, S. and Sill, A. and Trüper, T.; Proc. of the 2nd Int. Symposium on Autonomous Minirobots for Research and Edutainment; 02 / 2003

2002

AFM-based Micro Force Sensor and Haptic Interface for a Nanohandling Robot

Fahlbusch, S. and Shirinov, A. and Fatikow, S.; Proc. of the IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS); 09 / 2002

Development of a Versatile Nanohandling Station in a Scanning Electron Microscope

Fatikow, S. and Fahlbusch, S. and Garnica, S. and Hülsen, H. and Kortschack, A. and Shirinov, A. and Sill, A.; Proc. of the 3. Int. Workshop on Microfactories (IWMF); 09 / 2002

Flexible Microrobots for Object Handling in SEM Applications

Fatikow, S. and Fahlbusch, S. and Shirinov, A.; Proc. of the 1st Int. Colloquium of the Collaborative Research Centre 562; 05 / 2002

Smart materials for actuation in microrobotics

Fatikow, S. and Kortschack, A.; Proc. of SPIE Int. Symp. on Smart Structures, Devices, and Systems; 12 / 2002

Projects
of Prof. Dr.-Ing. Sergej Fatikow

0-9

3D-REM

3D-Echtzeit-Bildgebungs- und Messsystem für Rasterelektronenmikroskope (Sorry - this page is only available in German)

Duration: 2005 - 2009

µ4CNC

Modular multifunctional vacuum micro measurement station in accordance with the CNC-principle

Duration: 2014 - 2016

A

APNTR

Automatisierter Druckprozess von NTR-Sensoren auf der Nanoskala für ein AFM-SEM-System

Duration: 2019 - 2021

F

FIBLYS

FIB anaLYSis

Duration: 2008 - 2011

K

KeimOut

Zurück zur Kultur: Schnell-Nachweis multiresistenter Keime durch Kultivierung auf opto-fluidischen Beugungsstrukturen (sorry - only available in german)

Duration: 2015 - 2019

M

MiCROW

Development of a desktop microfactory

Duration: 2014 - 2016

N

NanoBits

Exchangeable and Customizable Scanning Probe Tips

Duration: 2010 - 2013

NanoHand

Mico-nano system for automatic handling of nano-objects

Duration: 2006 - 2009

O

OrBaMST

Machbarkeitsstudie "Nanopackaging mit organischen Basisstoffen in der MST (OrBaMST)" (Sorry - only available in german!)

Duration: 2010 - 2011

P

Papiersensor

Entwicklung von kostengünstigen, papierbasierten Schnelltests am Point-of-Care (sorry - only available in german)

Duration: 2015 - 2017

PiezoMA

Flexible Piezoantriebe für Massenmarktanwendungen (sorry - only available in German)

Duration: 2009 - 2011

PowerBonds

Enhancement of Fibre and Bond Strength Properties for Creating Added Value in Paper Products

Duration: 2012 - 2015

R

ROBOMAT

ROBOter zur Bestimmung von Mikro-MATerialeigenschaften (sorry - only available in German)

Duration: 2004 - 2007

ROBOSEM

Development of a Smart Nanorobot for Sensor-based Handling in a Scanning Electron Microscope

Duration: 2002 - 2005

Z

ZIM VIDEO

Duration: 2010 - 2012

ZuNaMi

Zukünftige Verfahren der Nano-/Mikroproduktion (sorry - only available in German)

Duration: 2006 - 2008