@inproceedings{Fat2002,
Author = {Fatikow, S. and Fahlbusch, S. and Garnica, S. and Hülsen, H. and Kortschack, A. and Shirinov, A. and Sill, A.},
Title = {Development of a Versatile Nanohandling Station in a Scanning Electron Microscope},

Year = {2002},
Pages = {93-96},
Month = {09},
Booktitle = {Proc. of the 3. Int. Workshop on Microfactories (IWMF)},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }