@inproceedings{Fat2004,Author = {Fatikow, S. and Kemper and M. and Kortschack, A. and Sievers, T. and Zenke, J. and Shirinov, A. and Hohn, S.},Title = {Versatile Nanohandling Robot Cell in a Scanning Electron Microscope},Year = {2004},Month = {06},Booktitle = {Proc. of 12th Mediterranean Conf. on Control and Automation},type = {inproceedings}}@COMMENT{Bibtex file generated on }