@inproceedings{Fat2005,Author = {Fatikow, S. and Wich, T. and Sievers, T. and Hülsen, H.},Title = {Automatic Nanohandling Station inside an SEM},Year = {2005},Pages = {21-22},Month = {10},Isbn = {-},Booktitle = {Topical Meeting of Microfacotories for MEMS and Nanofactories},type = {inproceedings}}@COMMENT{Bibtex file generated on }