@inproceedings{Wic2005, Author = {Wich, T. and Welker, J. and Meyer, I.}, Title = {An automated System for Electron Beam induced Deposition}, Year = {2005}, Month = {09}, Booktitle = {50. Internationales Wissenschaftliches Kolloquium (50. IWK)}, type = {inproceedings} } @COMMENT{Bibtex file generated on }