@inproceedings{Wan2006,
Author = {Wang, Z. and Su, Sh. and Verevkin, Y.K. and Fatikow, S.},
Title = {Reference pattern-based 2D measurement with nano resolution},

Year = {2006},
Month = {10},
Booktitle = {6th Int. Optomechatronics Conference on Visual/Optical Based Assembly and Packaging, SPIE's Optics East},
Organization = {SPIE},
chapter = {63760M},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }