@article{O.C2018,Author = {O.C. Haenssler, S. Fatikow, D. Théron},Title = {Multimodal imaging technology by integrated scanning electron, force, and microwave microscopy and its application to study microscaled capacitors},Journal = {J. of Vacuum Science \& Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena},Year = {2018},Pages = {9},Month = {01},Doi = {10.1116/1.5006161},type = {article}}@COMMENT{Bibtex file generated on }