@inproceedings{ F.2014,Author = { F. Krohs, O.C. Haenssler, M. Bartenwerfer; S. Fatikow},Title = { Atomic force microscopy for high resolution sidewall scans},Year = {2014},Pages = {4},Month = {10},Booktitle = {Int. Conf. on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)},Doi = {10.1109/3M-NANO.2014.7057303},type = {inproceedings}}@COMMENT{Bibtex file generated on }