@conference{F.T2016,Author = {F.T. von Kleist-Retzow, O.C. Haenssler, S. Fatikow},Title = {Simulation of Probe Misalignment Effects during RF On-Wafer Probing},Year = {2016},Month = {09},Booktitle = {41st Int. Conf. on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2016},Organization = {Technical University of Denmark},Doi = {10.1109/IRMMW-THz.2016.7758851},type = {conference}}@COMMENT{Bibtex file generated on }