@incollection{Wich.2010b,Author = {Wich, T. and Stolle, C. and Mikczinski, M. and Fatikow, S.},Title = {Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes},Year = {2010},Volume = {315},Pages = {167-173},Month = {01},Publisher = {Springer Berlin Heidelberg},Isbn = {978-3-642-11597-4},Booktitle = {IFIP Advances in Information and Communication Technology},type = {incollection}}@COMMENT{Bibtex file generated on }