@inproceedings{Fat2012,
Author = {Fatikow, Sergej and Bartenwerfer, Malte and Eichhorn, Volkmar and Zimmermann, Sören and Krohs, Florian},
Title = {Automated Nanofabrication by a Combined Robotic SEM/AFM/FIB system},

Year = {2012},
Pages = {571-576},
Month = {03},
Address = {Northwestern University, IL, USA},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }