@inproceedings{Elfert2016wafer,
Author = {Elfert, Patrick and Bartenwerfer, Malte and Fatikow, Sergej},
Title = {Wafer-scale Automation of Electron Beam Induced Depositions},

Year = {2016},
Booktitle = {Proc. of IEEE International Conference on Advanced Intelligent Mechatronics (AIM) 2016},
type = {inproceedings}
}
@COMMENT{Bibtex file generated on }