@inproceedings{Elfert2016wafer,Author = {Elfert, Patrick and Bartenwerfer, Malte and Fatikow, Sergej},Title = {Wafer-scale Automation of Electron Beam Induced Depositions},Year = {2016},Booktitle = {Proc. of IEEE International Conference on Advanced Intelligent Mechatronics (AIM) 2016},type = {inproceedings}}@COMMENT{Bibtex file generated on }