@conference{Eic2010,Author = {Eichhorn, V. and Jasper, D. and Dahmen, C. and Fatikow, S.},Title = {Automatisierte nanorobotische Mikro-Nano-Integration zur Herstellung prototypischer Mikrosysteme mit Nanostrukturen},Year = {2010},Pages = {73-78},Month = {03},type = {conference}}@COMMENT{Bibtex file generated on }