@article{KleistRetzow.2016,Author = {von Kleist-Retzow, Fabian T. and Tiemerding, Tobias and Elfert, Patrick and Haenssler, Olaf C. and Fatikow Sergej},Title = {Automated Calibration of RF On-Wafer Probing and Evaluation of Probe Misalignment Effects Using a Desktop Micro-Factory},Journal = {Journal of Computer and Communications},Year = {2016},Number = {03},Pages = {61-67},Edition = {04},Doi = {10.4236/jcc.2016.43009},type = {article}}@COMMENT{Bibtex file generated on }